Process window

The process window is a graph with a range of parameters for a specific manufacturing process that yields a defined result. Typically multiple parameters are plotted in such a graph with a central region where the process behaves well, while the outer borders define regions where the process becomes unstable or returns an unfavourable result. A statistical evaluation of the process performance is further performed by the calculation of the associated Process Window Index.[citation needed]

Applications

Typical applications are found in photolithography[1] where the response of a photoresist to parameters like temperature, radiation intensity, critical dimension and sidewall angle of the structures, etc. are plotted versus an optical parameter such as the numerical aperture to optimize the design of an exposure tool or to achieve a reproducible result and high yield.[citation needed]

References

  1. ^ Mack, Chris. "Swing curves and the process window" (PDF). Tutorials on Photolithography. Retrieved 1 October 2013.

Content Disclaimer

Informasi ini disarikan dari Wikipedia dan disajikan kembali untuk tujuan edukasi. Konten tersedia di bawah lisensi CC BY-SA 3.0. Kami tidak bertanggung jawab atas ketidakakuratan data yang bersumber dari kontribusi publik tersebut.

  1. The information displayed on this website is sourced in part or in whole from Wikipedia and has been adapted for the purpose of restating it. We strive to provide accurate and relevant information, however:
  2. There is no guarantee of absolute accuracy. Wikipedia is an open, collaborative project that can be edited by anyone, so information is subject to change.
  3. It is not intended to constitute professional advice. The content displayed is for informational and educational purposes only. For important decisions (e.g., medical, legal, or financial), please consult a professional.
  4. Content copyright. Wikipedia is licensed under the Creative Commons Attribution-ShareAlike License (CC BY-SA). This means that content may be reused with appropriate attribution and shared under a similar license.
  5. Responsible use. Any risk arising from the use of information from this website is entirely the responsibility of the user.